[Edaily Reporter Han Kwangbeom ] SamsungElectronics(005930)is transferring the equipment operation know-how it has accumulated at its semiconductor factories to public research facilities and providing unused semiconductor equipment. This initiative aims to support universities, research institutions, and companies specializing in semiconductor materials, components, and equipment so they can utilize these resources for semiconductor technology development through public research facilities.

The Ministry of Science and ICT announced on the 11th that it held the “SamsungElectronics–Korea Nano Technology Institute Public Nanofab Operational Efficiency Consulting Results Briefing and Used Equipment Transfer Ceremony” at the Korea Nano Technology Institute in Suwon, Gyeonggi Province.

This event is a follow-up to the memorandum of understanding (MOU) signed last March between the Ministry of Science and ICT and three major semiconductor companies—SamsungElectronics, SK hynix, and DB HiTek Co.,LTD. SamsungElectronics’ DS Division Win-Win Cooperation Center conducted a consulting project from June to October—a period of approximately four months—to improve the operation of the Korea Nano Technology Institute’s semiconductor research facilities.

SamsungElectronics had previously shared its expertise in operating semiconductor production facilities with the Korea Nano Technology Institute and the Korea Nano Convergence Technology Institute. This consulting project for the Korea Nano Technology Institute is an extension of that collaboration, applying the production site management experience accumulated by private companies to public research facilities.

◇ Incorporating Samsung’s Manufacturing Site Operations… Improving Equipment Safety and Management Systems

Public nanofabs are facilities that support universities, research institutions, and companies by providing access to the processes and equipment necessary for semiconductor research and development. SamsungElectronics adapted its “Materials, Parts, and Equipment Partner-Level Consulting”—previously conducted for semiconductor materials, parts, and equipment partners—to suit the operational environment of public nanofabs.

Specifically, the company revised the Standard Operating Procedures (SOPs), inspection checklists, and training and operational standards for each piece of equipment. The aim is to enhance the operational efficiency and safety of the research facility by clearly defining the necessary work procedures and management standards for each piece of equipment.

In particular, SamsungElectronics developed its first “On-site Inspection Manual” tailored to the Public Nanofab, incorporating the equipment inspection know-how used in its mass-production plants. By establishing standard procedures that allow the research facility to continuously monitor equipment condition and safety, the company has adapted private-sector management practices to suit a public research facility.

◇Reuse of Idle Private-Sector Equipment…Securing 8-Inch Semiconductor Process Analysis Capabilities

SamsungElectronics is also transferring semiconductor equipment it no longer uses to public research facilities. The equipment being transferred to the Korea Nano Technology Institute this time is an “automatic thin-film measurement system,” which can precisely measure the thickness and optical properties of single- and multi-layer thin films on 8-inch semiconductor wafers without damaging the wafers.

Thin films are thin layers of material formed on semiconductor wafers, and accurately measuring their thickness and properties is critical for process control. The transferred equipment is used to verify the condition of thin films and inspect processes during research and development.

Through this equipment transfer, the Korea Nano Technology Institute will secure previously unavailable capabilities for automated thin-film measurement on 8-inch wafers. The institute plans to utilize the equipment for research and development as well as technical support for companies, universities, and research institutes, and to integrate it with existing research facility services and professional training programs.

This equipment transfer was carried out through the Ministry of Science and ICT’s “MoaFab Used Equipment Utilization Support Project.” This initiative involves moving idle semiconductor equipment owned by companies to public nanofabs and providing financial support for the transfer and installation costs. It is a program designed to repurpose equipment no longer in use by the private sector for research and development.

Ji Hyun-ki, Head of the Win-Win Cooperation Center (Executive Vice President) at SamsungElectronics’ Device Solutions (DS) Division, stated, “We aim to contribute to a virtuous cycle of mutual growth, where the manufacturing innovation know-how accumulated by SamsungElectronics is passed on to researchers and materials, parts, and components companies through the Public Nanofab.” He added, “In particular, we will continue to actively participate in the process of expanding the consulting model developed this time to other MoaFab participating institutions, thereby consistently contributing to strengthening the competitiveness of the domestic semiconductor ecosystem.”

The government plans to expand this collaboration model to other public research facilities. Target institutions include the Specialized Semiconductor Technology Center at the Electronics and Telecommunications Research Institute (ETRI), the Seoul National University Joint Research Institute for Semiconductors, and the Next-Generation Sensor and Semiconductor Research Institute at the Daegu Gyeongbuk Institute of Science and Technology (DGIST). The plan is to share the consulting results and on-site inspection manuals with all MoaFab participating institutions and implement them sequentially.

Koo Hyuk-chae, First Vice Minister of Science and ICT, stated, “The importance of public-private cooperation—where private-sector equipment and know-how are integrated into public research infrastructure—is growing even more,” adding, “We will actively support semiconductor technology innovation and the training of specialized personnel.”