[E-Daily Reporter JAEMIN SONG ] Efforts to develop international standards for entrusting robots with tasks ranging from inspecting semiconductor equipment to replacing parts are gaining momentum. As the semiconductor industries in South Korea and Japan move to establish robot safety standards and communication specifications, respectively, automation is expected to expand into the equipment maintenance sector, following its adoption in production processes. This initiative aims to boost semiconductor productivity by reducing equipment downtime and minimizing the need for manual labor.

According to the semiconductor industry and the Semiconductor Equipment and Materials International (SEMI) on the 11th, Japan’s Information and Control Technology Committee is pushing forward with the development of communication standards for semiconductor equipment maintenance robots. The goal is to standardize the method of information exchange between robots, manufacturing equipment, factory management systems, and parts storage devices, with the aim of securing committee approval by December 15 of this year.

In South Korea as well, efforts are underway to establish safety standards for autonomous mobile robots (AMRs) specifically tailored for semiconductor factories. The SEMI Korea Environment, Health, and Safety Technical Committee began developing relevant standards last July and plans to prepare a draft by March of next year. The key focus is on reflecting the unique working environment of semiconductor factories, including cleanrooms, traffic patterns between workers and robots, and integration with manufacturing equipment.

SamsungElectronics is also participating in the domestic standardization effort. It is reported that SamsungElectronics established a dedicated organization within its Semiconductor (DS) Division last September to develop robots for factory automation. With equipment maintenance cited as a top priority for automation, the company is reportedly working to gather relevant data, such as robot movement paths, workspaces, and component storage specifications.

The semiconductor industry is focusing on maintenance robots because they are directly linked to production efficiency. Semiconductor equipment requires periodic internal inspections and replacement of consumables to ensure stable operation. Since workers are often directly involved in this process, reducing maintenance time is considered a key method for increasing equipment uptime.

Equipment manufacturers are also actively developing related technologies. U.S.-based Lam Research has developed a collaborative robot called “Destro” and is using it for maintenance tasks such as cleaning the interior of equipment and installing consumables. The goal is to reduce the burden on workers and improve equipment maintenance efficiency by increasing the accuracy of repetitive tasks performed by robots.

However, a major obstacle is that most existing semiconductor equipment was not designed with robot-assisted maintenance in mind. A joint SEMI research project involving SamsungElectronics, SK hynix, and Intel identified differing data standards and component structures across equipment models, as well as transportation systems unsuited for automation, as key challenges.

Once international standards are established, compatibility between robots and existing production facilities is expected to improve, allowing for broader on-site application of automated maintenance. However, given that operating environments vary by equipment and safety and economic feasibility must be verified, it is likely to take considerable time before actual implementation.

An official from the semiconductor industry stated, “Automation of semiconductor equipment maintenance is still in its early stages, so it is difficult to determine specific implementation methods or effects,” adding, “Since the structure and operating environments vary by equipment, there are challenges that must be addressed as we develop the relevant technologies and standards.”